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In situ ellipsometric characterization of SiN[sub x] films grown by laser ablation

✍ Scribed by Samano, E. C.; Machorro, R.; Soto, G.; Cota-Araiza, L.


Book ID
120384981
Publisher
American Institute of Physics
Year
1998
Tongue
English
Weight
682 KB
Volume
84
Category
Article
ISSN
0021-8979

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In situ ellipsometric characterization o
✍ A.Ahlberg Tidblad; J. Martensson πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 1016 KB

In the chlorate process, it is known that a small addition of chromate to the electrolyte increases the current efficiency at the cathode by hindering the electrochemical reduction of intermediately formed hypochlorite. This paper presents results from in situ ellipsometric studies of the formation