In Situ EC-STM Studies of MPS, SPS, and Chloride on Cu(100): Structural Studies of Accelerators for Dual Damascene Electrodeposition †

✍ Scribed by Bae, Sang-Eun; Gewirth, Andrew A.

• Book ID: 126911102
• Publisher: American Chemical Society
• Year: 2006
• Tongue: English
• Weight: 747 KB
• Volume: 22
• Category: Article
• ISSN: 0743-7463
• DOI: 10.1021/la061157t