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In situ doping of DLC films

✍ Scribed by Szmidt, Jan; Olszyna, Andrzej; Sokołowska, Aleksandra; Mitura, Stanisław

Book ID
125443285
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
340 KB
Volume
5
Category
Article
ISSN
0925-9635

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## Abstract This article reports results of endothelial cell interaction with atom beam source N‐doped a‐C:H (diamond‐like carbon, DLC) as it compares with that of Si‐doped DLC thin films. The RF plasma source exhibits up to 40% N‐dissociation and N‐atomic fluxes of ∼0.85 × 10^18^ atoms/s, which en