✦ LIBER ✦
In-situ doping and composition monitoring for molecular beam epitaxy using mass spectroscopy of recoiled ions (MSRI)
✍ Scribed by K. Waters; A. Bensaoula; A. Schultz; K. Eipers-Smith; A. Freundlich
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 367 KB
- Volume
- 127
- Category
- Article
- ISSN
- 0022-0248
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