In situ deposition of high Tc materials using vacuum arc ablation with macroparticle filter

✍ Scribed by G Sloggett; DR McKenzie; DJH Cockayne; GB Smith; B Jenkins; CP Foley; Y Takano; AJ Studer; JG Haub; BJ Orr

• Book ID: 103938560
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 202 KB
• Volume: 194-196
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(94)91676-4

✦ Synopsis

Vacuum arc ablation is shown to be a new deposition technique for depositing YBCO thin films in situ with zero resistance below 85 K. A high deposition rate was achieved from small specimens. The size of macroparticles is larger than for laser ablation for the same target material, but a curved solenoidal filter was used to reduce the macroparticle content.