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In situ cleaning of GaAs surfaces using hydrogen dissociated with a remote noble-gas discharge
✍ Scribed by Hattangady, S. V.; Rudder, R. A.; Mantini, M. J.; Fountain, G. G.; Posthill, J. B.; Markunas, R. J.
- Book ID
- 126316900
- Publisher
- American Institute of Physics
- Year
- 1990
- Tongue
- English
- Weight
- 619 KB
- Volume
- 68
- Category
- Article
- ISSN
- 0021-8979
- DOI
- 10.1063/1.346723
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