Depth Profiling by Ion Beams Analysis Te
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Markwitz, A.; Demortier, G.
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Article
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1996
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John Wiley and Sons
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English
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Ion beam analysis (IBA) methods were used for the characterization of interdiffusion in thin Au-A1 multilayered systems. Conventional RBS with a high depth resolution at the specimen surface and at the interfaces (e.g. 14 nm in the depth of 255 nm) was used for gold depth profiling. In contrast to g