In situ characterization of ALE growth by reagent pulse delay times in a flow-type reactor

✍ Scribed by J. Aarik; A. Aidla; K. Kukli

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 364 KB
• Volume: 75
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/0169-4332(94)90157-0