In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD

✍ Scribed by Sun, Guo Sheng; Zhao, Yong Mei; Wang, Liang; Wang, Lei; Zhao, Wan Shun; Liu, Xing Fang; Ji, Gang; Zeng, Yi Ping

• Book ID: 120880264
• Publisher: Trans Tech Publications, Ltd.
• Year: 2008
• Tongue: English
• Weight: 314 KB
• Volume: 600-603
• Category: Article
• ISSN: 1662-9752
• DOI: 10.4028/www.scientific.net/MSF.600-603.147