In situ and real-time ellipsometry diagnostic techniques towards the monitoring of the bonding structure and growth kinetics: silicon oxide coatings

✍ Scribed by S. Logothetidis; A. Laskarakis; A. Gika; P. Patsalas

• Book ID: 108423005
• Publisher: Elsevier Science
• Year: 2002
• Tongue: English
• Weight: 149 KB
• Volume: 151-152
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(01)01620-6