In-situ analysis of positive and negative energetic ions generated during Sn-doped In2O3 deposition by reactive sputtering

✍ Scribed by Naoki Tsukamoto; Toshiyuki Tazawa; Nobuto Oka; Motoaki Saito; Yuzo Shigesato

• Book ID: 113936990
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 725 KB
• Volume: 520
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2011.04.143