✦ LIBER ✦
In-process monitoring and control of doping gas concentration during vapor phase silicon epitaxial growth by using a flame photometric detector
✍ Scribed by Takaya Suzuki; Yosuke Inoue; Mitsuru Ura; Takuzo Ogawa; Yoshimitsu Sugita
- Book ID
- 107789034
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 785 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0022-0248
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