Impurity generation due to non-thermal electrons and its control by external bias

✍ Scribed by S. Takamura; A. Sato; Y. Shen; T. Okuda

• Publisher: Elsevier Science
• Year: 1987
• Tongue: English
• Weight: 577 KB
• Volume: 149
• Category: Article
• ISSN: 0022-3115
• DOI: 10.1016/0022-3115(87)90479-x