✦ LIBER ✦
Impurity diffusion in silicon enhanced by low energy ion bombardment: V E Borisenko,Minsk Radioengineering Institute, P. Browka 6, 220600 Minsk, USSR
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 133 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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