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Impurity diffusion in amorphous hydrogenated silicon

✍ Scribed by V.Kh. Kudoyarova; G.S. Kulikov; E.I. Terukov; K.K. Khodzaev

Book ID: 119444129
Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 174 KB
Volume: 90
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(87)80416-7

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