Improving the morphological and magnetic properties of permalloy films by adopting ultra-low-pressure sputtering

✍ Scribed by Tang, Xiao-Li; Su, Hua; Zhang, Huai-Wu; Zhong, Zhi-Yong; Jing, Yu-Lan

• Book ID: 122261509
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 846 KB
• Volume: 550
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.11.005