✦ LIBER ✦
Improving the gas barrier properties of a-SiOxCyNz film at low temperature using high energy and suitable nitrogen flow rate
✍ Scribed by Jin, Su B.; Lee, Joon S.; Choi, Yoon S.; Choi, In S.; Han, Jeon G.; Hori, M.
- Book ID
- 122880372
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 489 KB
- Volume
- 13
- Category
- Article
- ISSN
- 1567-1739
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