✦ LIBER ✦
Improving stamps for 10 nm level wafer scale nanoimprint lithography
✍ Scribed by M. Beck; M. Graczyk; I. Maximov; E.-L. Sarwe; T.G.I. Ling; M. Keil; L. Montelius
- Book ID
- 114155399
- Publisher
- Elsevier Science
- Year
- 2002
- Tongue
- English
- Weight
- 495 KB
- Volume
- 61-62
- Category
- Article
- ISSN
- 0167-9317
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