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Improving characteristics of Si-based trench-electrode metal-semiconductor-metal photodetectors using self-aligned process

✍ Scribed by Lin, C.-S.; Yeh, R.-H.; Liao, C.H.; Hong, J.W.


Book ID
114455890
Publisher
The Institution of Electrical Engineers
Year
2001
Tongue
English
Weight
484 KB
Volume
148
Category
Article
ISSN
1350-2433

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