Improvements in the angular current density of inductively coupled plasma ion source for focused heavy ion beams

✍ Scribed by Menon, Ranjini; Nabhiraj, P.Y.; Bhandari, R.K.

• Book ID: 120272786
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 626 KB
• Volume: 97
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2013.04.008