✦ LIBER ✦
Improvement of thin-gate oxide integrity using photo-enhanced low-temperature nitridation
✍ Scribed by Y.K. Fang; K.C. Hwang; Y.W. Chen; C.P. Chiang
- Publisher
- Elsevier Science
- Year
- 1990
- Tongue
- English
- Weight
- 266 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0038-1101
No coin nor oath required. For personal study only.