๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Improvement of the surface characteristics of sputtered metal layer for a MEMS micro-mirror switch

โœ Scribed by M.-W. Lee; S.-B. Jo; K.-C. Lee; C.-W. Kim; S.-G. Park; S.-G. Lee; E.-H. Lee; Beom-Hoan. O.

Book ID
113936419
Publisher
Elsevier Science
Year
2004
Tongue
English
Weight
422 KB
Volume
447-448
Category
Article
ISSN
0040-6090

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

[Conference Proceedings of the Society f
[Conference Proceedings of the Society for Experimental Mechanics Series] MEMS and Nanotechnology, Volume 6 || Characterizing Metal Insulator Transition (MIT) Materials for Use as Micro-Switch Elements
โœ Shaw, Gordon A.; Prorok, Barton C.; Starman, LaVern A. ๐Ÿ“‚ Article ๐Ÿ“… 2012 ๐Ÿ› Springer New York ๐ŸŒ English โš– 558 KB

MEMS and Nanotechnology, Volume 6: Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics represents one of seven volumes of technical papers presented at the Society for Experimental Mechanics SEM 12th International Congress & Exposition on Experimental and Applied Mechanic