✦ LIBER ✦
Improvement of the crystallinity of 3C-SiC films by lowering the electron temperatures in the afterglow plasma region using triode plasma CVD
✍ Scribed by K. Yasui; N. Ninagawa; T. Akahane
- Book ID
- 107457522
- Publisher
- Springer US
- Year
- 1997
- Tongue
- English
- Weight
- 467 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0361-5235
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