✦ LIBER ✦
Improvement of interface morphology between titanium-silicide and poly-Si thin film using Ar plasma treatment
✍ Scribed by Jae-Moon Choi; Dae-Jung Kim; Hyoung-In Kim; Myoung-Gi So
- Book ID
- 110367678
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 824 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0261-8028
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