Improvement of gas-switching abruptness for atmospheric pressure organometallic vapor phase epitaxy

✍ Scribed by Farid Agahi; Charles R. Lutz Jr.; Kei May Lau

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 547 KB
• Volume: 139
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)90186-4