Improvement of electron gun brightness in conventional scanning electron microscope (SEM) by coating its tungsten filament with a zirconium carbide (ZrC) thin film

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 163 KB
• Volume: 30
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/s0042-207x(80)80706-8