✦ LIBER ✦
Improvement of dislocation density in thick CVD single crystal diamond films by coupling H 2 /O 2 plasma etching and chemo-mechanical or ICP treatment of HPHT substrates
✍ Scribed by Achard, J.; Tallaire, A.; Mille, V.; Naamoun, M.; Brinza, O.; Boussadi, A.; William, L.; Gicquel, A.
- Book ID
- 121849006
- Publisher
- John Wiley and Sons
- Year
- 2014
- Tongue
- English
- Weight
- 504 KB
- Volume
- 211
- Category
- Article
- ISSN
- 0031-8965
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