✦ LIBER ✦
Improvement of device characteristics by multiple step implants or introducing a C gettering layer
✍ Scribed by R.C.M. Wijburg; J.R. Liefting; J.S. Custer; H. Wallinga; F.W. Saris
- Book ID
- 103598809
- Publisher
- Elsevier Science
- Year
- 1992
- Tongue
- English
- Weight
- 280 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0167-9317
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