✦ LIBER ✦
Improvement in epitaxial quality of selectively grown Si1−xGex layers with low pattern sensitivity for CMOS applications
✍ Scribed by H.H. Radamson; J. Hållstedt; E. Suvar; C. Menon; M. Östling
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 323 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1369-8001
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