✦ LIBER ✦
Improved temperature stability of Mo/Si multilayers by carbide based diffusion barriers through implantation of low energy CHx+ ions
✍ Scribed by L.G.A.M. Alink; R.W.E. van de Kruijs; E. Louis; F. Bijkerk; J. Verhoeven
- Book ID
- 108289191
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 220 KB
- Volume
- 510
- Category
- Article
- ISSN
- 0040-6090
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