✦ LIBER ✦
Improved surface morphology of sulfur-doped homoepitaxial diamond films by plasma CVD method with SF6 Grading–Doping profile
✍ Scribed by Sachiko Fujii; Shigeru Hino; Takeshi Kobayashi
- Book ID
- 108418104
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 256 KB
- Volume
- 216
- Category
- Article
- ISSN
- 0169-4332
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