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Improved sputter depth resolution in Auger thin film analysis using in situ low angle cross-sections

✍ Scribed by Uwe Scheithauer

Book ID
108417458
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
240 KB
Volume
179
Category
Article
ISSN
0169-4332

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📜 SIMILAR VOLUMES

Improved depth resolution in Auger depth
Improved depth resolution in Auger depth profiles of TiN thin films by optimized sputtering parameters
✍ W. Pamler; E. Wildenauer; A. Mitwalsky 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 662 KB

## Abstract The depth resolution in Auger in‐depth profiles of TiN thin films on smooth Si substrates is determined by the evolution of a sputter‐induced surface roughness. It is shown that this effect depends critically on the ion angle of incidence. Therefore, the depth resolution can be improved