Improved quality a-SiC:H films prepared by photo chemical vapour decomposition of silane and acetylene

✍ Scribed by Swati Ray; Sukriti Ghosh; Abhijit De; A.K. Barua

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 758 KB
• Volume: 33
• Category: Article
• ISSN: 0927-0248
• DOI: 10.1016/0927-0248(94)90011-6