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Improved planar isolation with buried-channel MOS FET's : H. Sunami, Y. Kawamoto, K. Shimohigashi and N. Hashimoto. Microelectron. Reliab.24, 555 (1984)

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 123 KB
Volume: 25
Category: Article
ISSN: 0026-2714
DOI: 10.1016/0026-2714(85)90120-9

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