Improved growth of Ge quantum dots in Ge/Si stacked layers by pre-intermixing treatments

✍ Scribed by S.W Lee; L.J Chen; P.S Chen; M.-J Tsai; C.W Liu; W.Y Chen; T.M Hsu

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 307 KB
• Volume: 224
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2003.08.098