✦ LIBER ✦
Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2
✍ Scribed by Mihaela Popovici; Min-Soo Kim; Kazuyuki Tomida; Johan Swerts; Hilde Tielens; Alain Moussa; Olivier Richard; Hugo Bender; Alexis Franquet; Thierry Conard; Laith Altimime; Sven Van Elshocht; Jorge A. Kittl
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 593 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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