✦ LIBER ✦
Improved electrical stability and UV emission of zinc oxide thin films prepared by combination of metalorganic chemical vapor deposition technique and post-deposition hydrogen doping
✍ Scribed by Seung Yeop Myong; Koeng Su Lim
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 234 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1566-1199
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✦ Synopsis
Fourier transform infrared and photoluminescence spectroscopy provide strong evidence that post-deposition hydrogen doping of polycrystalline zinc oxide (ZnO) thin films improves the resistivity by increasing hydrogen-related shallow donors and hydrogen passivation of native defects. Improvement of the electrical stability and UV emission confirm that post-deposition hydrogen doping is a promising method to achieve high quality ZnO thin films for the use as transparent electrodes and/or UV light emitters in thin-film-based optoelectronic devices.