✦ LIBER ✦
Improved Capacitance Density and Reliability of High-$ \kappa$$\hbox{Ni}/\hbox{ZrO}_{2}/\hbox{TiN}$ MIM Capacitors Using Laser-Annealing Technique
✍ Scribed by Tsai, C Y; Chiang, K C; Lin, S H; Hsu, K C; Chi, C C; Chin, Albert
- Book ID
- 121851773
- Publisher
- IEEE
- Year
- 2010
- Tongue
- English
- Weight
- 408 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0741-3106
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