Imprinting of nanopores in organosilicate dielectric thin films with hyperbranched ketalized polyglycidol

✍ Scribed by Jong-Seong Kim; Hyun-Chul Kim; Byeongdu Lee; Moonhor Ree

• Book ID: 108248150
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 249 KB
• Volume: 46
• Category: Article
• ISSN: 0032-3861
• DOI: 10.1016/j.polymer.2005.06.024