✦ LIBER ✦
Imposition of defined states of stress on thin films by a wafer-curvature method; validation and application to aging Sn films
✍ Scribed by Stein, J.; Pascher, M.; Welzel, U.; Huegel, W.; Mittemeijer, E.J.
- Book ID
- 126129414
- Publisher
- Elsevier Science
- Year
- 2014
- Tongue
- English
- Weight
- 898 KB
- Volume
- 568
- Category
- Article
- ISSN
- 0040-6090
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