✦ LIBER ✦
Implementation of a piezoresistive MEMS cantilever for nanoscale force measurement in micro/nano robotic applications
✍ Scribed by Kim, Deok-Ho ;Kim, Byungkyu ;Park, Jong-Oh
- Publisher
- Springer-Verlag
- Year
- 2004
- Tongue
- Korean
- Weight
- 772 KB
- Volume
- 18
- Category
- Article
- ISSN
- 1226-4865
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