𝔖 Bobbio Scriptorium

✦ LIBER ✦

Implanted boron depth profiles in the AZ111 photoresist: R B Guimarães et al, J appl Phys, 63, 1988, 2083–2085

Book ID: 103467405
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 152 KB
Volume: 39
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(89)90444-2

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