✦ LIBER ✦
Implantation profiles and sputtering studied by detecting the optical radiation from sputtered particles during ion bombardment
✍ Scribed by B. Emmoth; M. Braun; H.P. Palenius
- Publisher
- Elsevier Science
- Year
- 1976
- Tongue
- English
- Weight
- 530 KB
- Volume
- 63
- Category
- Article
- ISSN
- 0022-3115
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