Implantation of 29Si into GaAs {100}: Surface analysis and modelling of the dopant distribution

✍ Scribed by I. R. Hill; W. M. Lau; R. A. North

• Book ID: 104592233
• Publisher: John Wiley and Sons
• Year: 1988
• Tongue: English
• Weight: 381 KB
• Volume: 13
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740130111