✦ LIBER ✦
Implantation damage control of silicon indiffusion during rapid thermal annealing of InP using AlN/Si3N4 as an encapsulant
✍ Scribed by J.H. Wilkie; B.J. Sealy
- Publisher
- Elsevier Science
- Year
- 1988
- Tongue
- English
- Weight
- 503 KB
- Volume
- 162
- Category
- Article
- ISSN
- 0040-6090
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