✦ LIBER ✦
Implantation damage and its effect on channelling : D. J. Bennett and T. E. Price. Microelectronics Journal, 24, 811 (1993)
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 111 KB
- Volume
- 34
- Category
- Article
- ISSN
- 0026-2714
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