✦ LIBER ✦
Implantation and post-annealing characteristics when impinging small Bn clusters into silicon at low fluence
✍ Scribed by J.H. Liang; H.M. Han
- Publisher
- Elsevier Science
- Year
- 2005
- Tongue
- English
- Weight
- 305 KB
- Volume
- 228
- Category
- Article
- ISSN
- 0168-583X
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