✦ LIBER ✦
Impact of Ti Sputter Target Denitridation on the Crystallographic Orientation of Single Ti Layers and Ti/TiN/AlCu Layer Stacks on Different Oxides
✍ Scribed by D. Wolansky; P. Zaumseil
- Book ID
- 107455463
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 465 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0361-5235
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