✦ LIBER ✦
Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation
✍ Scribed by C. Huyghebaert; T. Conard; B. Brijs; W. Vandervorst
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 245 KB
- Volume
- 231-232
- Category
- Article
- ISSN
- 0169-4332
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