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Impact of scaling silicon film thickness and channel width on SOI MOSFET with reoxidized MESA isolation

✍ Scribed by Fung, S.K.H.; Chan, M.; Ko, P.K.


Book ID
114537270
Publisher
IEEE
Year
1998
Tongue
English
Weight
202 KB
Volume
45
Category
Article
ISSN
0018-9383

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